Enhanced white photoluminescence in silicon-rich oxide/SiO2 superlattices by low-energy ion-beam treatment

This study presents the crystalline and luminescence properties of silicon-rich oxide (SRO)/SiO₂ superlattices in which the SRO layers were prepared with a low-energy (<60 eV) argon ion-beam treatment. Experimental results evidenced that density of the Si nanocrystals (NCs) in the SRO layer was increased by ion-beam treatment after annealing, increasing the surface roughness. The stoichiometry of the as-prepared SRO layer was unchanged but the phase separation of the annealed SRO layer was enhanced by the ion-beam treatment, yielding visible white photoluminescence from the E' centers and Si NCs.