Fingerprint
Dive into the research topics of 'Enhancement of CMOSFETs performance by utilizing SACVD-based shallow trench isolation for the 40-nm node and beyond'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Enhancement of CMOSFETs performance by utilizing SACVD-based shallow trench isolation for the 40-nm node and beyond
Yao Tsung Huang, San Lein Wu, Shoou Jinn Chang, Chin Kai Hung, Tzu Juei Wang, Cheng Wen Kuo, Cheng Tung Huang, Osbert Cheng
Research output: Contribution to journal › Article › peer-review
4
Citations
(Scopus)