TY - JOUR
T1 - Enhancement of semiconductor equipment communications using a web-enabled equipment driver
AU - Cheng, Fan Tien
AU - Lin, Meng Tsang
N1 - Funding Information:
Manuscript received October 21, 1999; revised May 7, 2001. This work was supported by the National Science Council of the Republic of China under Contract NSC-89-2212-E-006-042 and Contract NSC-89-2622-E-006-004. The authors are with the Institute of Manufacturing Engineering, National Cheng Kung University, Tainan 70101, Taiwan, R.O.C. Publisher Item Identifier S 0894-6507(01)09771-8.
PY - 2001/11
Y1 - 2001/11
N2 - Equipment communications are essential for semiconductor manufacturing automation. Equipment managers generally function to communicate between the manufacturing execution system (MES) and equipment. Connecting a different machine to the equipment manager requires modifying the associated equipment driver (ED) accordingly, which needs some efforts. To solve this problem, this study proposes a novel, web-enabled equipment driver (WED) that uses mobile object technology. Initially, a mobile object model with a Java applet, namely WED, is developed. WED is constructed on the equipment (server) side. Then, the equipment manager (client) downloads WED via a web browser. This process does not need to modify ED. Subsequently, the equipment manager can communicate with the equipment by either the Java socket technology using the high-speed SECS message services (HSMS) standard or the object web technology through the common object request broker architecture (CORBA) or distributed component object model (DCOM) protocols using the object-based equipment model (OBEM) standard. This proposed scheme has been successfully implemented. Illustrative examples reveal that the proposed mobile object model and WED establish a novel, efficient, and versatile scheme for semiconductor equipment communications.
AB - Equipment communications are essential for semiconductor manufacturing automation. Equipment managers generally function to communicate between the manufacturing execution system (MES) and equipment. Connecting a different machine to the equipment manager requires modifying the associated equipment driver (ED) accordingly, which needs some efforts. To solve this problem, this study proposes a novel, web-enabled equipment driver (WED) that uses mobile object technology. Initially, a mobile object model with a Java applet, namely WED, is developed. WED is constructed on the equipment (server) side. Then, the equipment manager (client) downloads WED via a web browser. This process does not need to modify ED. Subsequently, the equipment manager can communicate with the equipment by either the Java socket technology using the high-speed SECS message services (HSMS) standard or the object web technology through the common object request broker architecture (CORBA) or distributed component object model (DCOM) protocols using the object-based equipment model (OBEM) standard. This proposed scheme has been successfully implemented. Illustrative examples reveal that the proposed mobile object model and WED establish a novel, efficient, and versatile scheme for semiconductor equipment communications.
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U2 - 10.1109/66.964324
DO - 10.1109/66.964324
M3 - Article
AN - SCOPUS:0035508794
SN - 0894-6507
VL - 14
SP - 372
EP - 380
JO - IEEE Transactions on Semiconductor Manufacturing
JF - IEEE Transactions on Semiconductor Manufacturing
IS - 4
ER -