Abstract
The electron emission characteristics of planar field emission arrays (FEAs), containing diamondlike carbon (DLC) films as emitters, were investigated. Precoating an Au layer on Si prior to the deposition of DLC films further improves the emission properties of FEAs. A high emission current capacity as 0.5 mA/cm2 has been achieved, which corresponds to a large emission current density as 44 mA/cm2 for DLC films in the emitting dots. However, preannealing the Au-coating at 500°C (30 min) is necessary to improve the characteristics of film-to-substrate interface and the DLC films' electron field emission properties.
Original language | English |
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Pages (from-to) | 499-503 |
Number of pages | 5 |
Journal | Applied Surface Science |
Volume | 142 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1999 Apr |
Event | Proceedings of the 1998 9th International Conference on Solid Films and Surfaces, ICSFS-9 - Copenhagen, Denmark Duration: 1998 Jul 6 → 1998 Jul 10 |
All Science Journal Classification (ASJC) codes
- General Chemistry
- Condensed Matter Physics
- General Physics and Astronomy
- Surfaces and Interfaces
- Surfaces, Coatings and Films