Enhancement on diamondlike carbon coated planar electron field emission array using Au-precoating

C. M. Lin, S. J. Chang, Meiso Yokoyama, F. Y. Chuang, C. H. Tsai, W. C. Wang, I. N. Lin

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


The electron emission characteristics of planar field emission arrays (FEAs), containing diamondlike carbon (DLC) films as emitters, were investigated. Precoating an Au layer on Si prior to the deposition of DLC films further improves the emission properties of FEAs. A high emission current capacity as 0.5 mA/cm2 has been achieved, which corresponds to a large emission current density as 44 mA/cm2 for DLC films in the emitting dots. However, preannealing the Au-coating at 500°C (30 min) is necessary to improve the characteristics of film-to-substrate interface and the DLC films' electron field emission properties.

Original languageEnglish
Pages (from-to)499-503
Number of pages5
JournalApplied Surface Science
Issue number1
Publication statusPublished - 1999 Apr
EventProceedings of the 1998 9th International Conference on Solid Films and Surfaces, ICSFS-9 - Copenhagen, Denmark
Duration: 1998 Jul 61998 Jul 10

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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