Enhancement Performance of Co-sputtered Ti-IGZO Thin-Film Transistors with Al-ZrO2 Gate Dielectric

Cheng-Xiou Lin, Shui-Jinn Wang, Rong-Ming Ko, Yi Sheng Wang, Chun Kai Liao, Hsiang Yi Chen, Sheng Tsang Hsiao, Bing Cheng You

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2018 International Conference on Solid State Devices and Materials (SSDM’18)
Place of PublicationTokyo, Japan
Publication statusPublished - 2018 Sep 11

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