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Epitaxial growth of the GaN film by remote-plasma metalorganic chemical vapor deposition
Wei Chi Lai, Chun Yen Chang, Meiso Yokoyama, Jen Dar Guo, Jian Shihn Tsang, Shih Hsiung Chan, Jong Shing Bow, Sun Chin Wei, Ray Hua Hong, Simon M. Sze
Research output: Contribution to journal › Article › peer-review
8
Citations
(Scopus)