Epitaxy of Zn2TiO4 (1 1 1) thin films on GaN (0 0 1)

Chu Yun Hsiao, Jhih Cheng Wu, Chuan-Feng Shih

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

High-permittivity spinel Zn2TiO4 thin films were grown on GaN (0 0 1) by rf-sputtering. Grazing-angle, powder, and pole-figure X-ray diffractometries (XRD) were performed to identify the crystallinity and the preferred orientation of the Zn2TiO4 films. Lattice image at the Zn2TiO4 (1 1 1)/GaN (0 0 1) interface was obtained by high-resolution transmission-electron microscopy (HR-TEM). An oxygen atmosphere in sputtering and post heat-treatment using rapid thermal annealing effectively enhanced the epitaxy. The epitaxial relationship was determined from the XRD and HR-TEM results: (11)Zn2TiO4||(001) GaN, (202)Zn2TiO4||(110)GaN,and 211Zn2TiO4||0110GaN. Finally, the relative permittivity, interfacial trap density and the flat-band voltage of the Zn 2TiO4 based capacitor were ∼18.9, 8.38 × 10 11 eV-1 cm-2, and 1.1 V, respectively, indicating the potential applications of the Zn2TiO4 thin film to the GaN-based metal-oxide-semiconductor capacitor.

Original languageEnglish
Pages (from-to)1316-1320
Number of pages5
JournalMaterials Research Bulletin
Volume48
Issue number3
DOIs
Publication statusPublished - 2013 Mar 1

Fingerprint

High resolution transmission electron microscopy
Epitaxial growth
epitaxy
X ray diffraction analysis
Sputtering
capacitors
Capacitors
Permittivity
sputtering
permittivity
Thin films
transmission electron microscopy
Rapid thermal annealing
high resolution
grazing
thin films
metal oxide semiconductors
Powders
spinel
Poles

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Hsiao, Chu Yun ; Wu, Jhih Cheng ; Shih, Chuan-Feng. / Epitaxy of Zn2TiO4 (1 1 1) thin films on GaN (0 0 1). In: Materials Research Bulletin. 2013 ; Vol. 48, No. 3. pp. 1316-1320.
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Epitaxy of Zn2TiO4 (1 1 1) thin films on GaN (0 0 1). / Hsiao, Chu Yun; Wu, Jhih Cheng; Shih, Chuan-Feng.

In: Materials Research Bulletin, Vol. 48, No. 3, 01.03.2013, p. 1316-1320.

Research output: Contribution to journalArticle

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