Equipment Health Monitoring in the Semiconductor Assembly Process.

Dong Zhao-Hong, Jang Bo-Kai, Chia-Yen Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe 27th International Conference on Flexible Automation and Intelligent Manufacturing (FAIM2017)
Place of PublicationModena, Italy
Publication statusPublished - 2017

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