Equipment managemant method

Fan-Tien Cheng (Inventor)

Research output: Patent

Abstract

An equipment management method for managing semiconductor equipment via an equipment manager. In the equipment management method, production scenario rules and equipment behavior rules are first defined respectively in a production scenario database of a configuration controller and an equipment behavior database of an equipment driver. Them, a command is received from a manufacturing execution system (MES), and is converted into a production process scenario by looking up the corresponding production scenario rule in the production scenario database. Thereafter, the production process scenario is converted into a GEI (generic equipment interface) message with a GEI message specification, and the GEI message is transmitted to the equipment driver.
Original languageChinese
Patent number7003367
Publication statusPublished - 2003 Nov 6

Cite this

Cheng, F-T. (2003). Equipment managemant method. (Patent No. 7003367).