Abstract
| Original language | Chinese |
|---|---|
| Patent number | 7003367 |
| Publication status | Published - 2003 Nov 6 |
Cite this
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Equipment managemant method. / Cheng, Fan-Tien (Inventor).
Patent No.: 7003367.Research output: Patent
TY - PAT
T1 - Equipment managemant method
AU - Cheng, Fan-Tien
PY - 2003/11/6
Y1 - 2003/11/6
N2 - An equipment management method for managing semiconductor equipment via an equipment manager. In the equipment management method, production scenario rules and equipment behavior rules are first defined respectively in a production scenario database of a configuration controller and an equipment behavior database of an equipment driver. Them, a command is received from a manufacturing execution system (MES), and is converted into a production process scenario by looking up the corresponding production scenario rule in the production scenario database. Thereafter, the production process scenario is converted into a GEI (generic equipment interface) message with a GEI message specification, and the GEI message is transmitted to the equipment driver.
AB - An equipment management method for managing semiconductor equipment via an equipment manager. In the equipment management method, production scenario rules and equipment behavior rules are first defined respectively in a production scenario database of a configuration controller and an equipment behavior database of an equipment driver. Them, a command is received from a manufacturing execution system (MES), and is converted into a production process scenario by looking up the corresponding production scenario rule in the production scenario database. Thereafter, the production process scenario is converted into a GEI (generic equipment interface) message with a GEI message specification, and the GEI message is transmitted to the equipment driver.
M3 - Patent
M1 - 7003367
ER -