Equivalent strengths for reliability assessment of MEMS structures

Kuo-Shen Chen, Kuang Shun Ou

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The scattering and inconsistency of tested strength of brittle microelectromechanical systems (MEMS) materials imposes a critical obstacle for structural reliability assessment of MEMS devices. In this article, the nature of such a discrepancy and the effort to solve this issue are discussed. A method based on equal failure probability is proposed to map the material strength obtained from test specimens to the equivalent strength for MEMS structural design. This conversion can be classified into three types to deal with difference in size, geometry, and applied loadings manner and the possible approach to form a material strength database for brittle MEMS material is suggested. The weakest link theory and Weibull statistics are adapted for illustrating the proposed data reduction process. Several examples are provided to illustrate the possible applications of this work. Finally, an equivalent safety factor concept is proposed to promote probabilistic structural design and the perspective to achieve a MEMS material strength database is discussed.

Original languageEnglish
Pages (from-to)163-174
Number of pages12
JournalSensors and Actuators, A: Physical
Volume112
Issue number1
DOIs
Publication statusPublished - 2004 Apr 15

Fingerprint

microelectromechanical systems
MEMS
structural design
mechanical properties
Structural design
structural reliability
safety factors
Safety factor
data reduction
Data reduction
Statistics
statistics
Scattering
Geometry
geometry
scattering

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

@article{9b06fbc77c454640b456e9f12dff192d,
title = "Equivalent strengths for reliability assessment of MEMS structures",
abstract = "The scattering and inconsistency of tested strength of brittle microelectromechanical systems (MEMS) materials imposes a critical obstacle for structural reliability assessment of MEMS devices. In this article, the nature of such a discrepancy and the effort to solve this issue are discussed. A method based on equal failure probability is proposed to map the material strength obtained from test specimens to the equivalent strength for MEMS structural design. This conversion can be classified into three types to deal with difference in size, geometry, and applied loadings manner and the possible approach to form a material strength database for brittle MEMS material is suggested. The weakest link theory and Weibull statistics are adapted for illustrating the proposed data reduction process. Several examples are provided to illustrate the possible applications of this work. Finally, an equivalent safety factor concept is proposed to promote probabilistic structural design and the perspective to achieve a MEMS material strength database is discussed.",
author = "Kuo-Shen Chen and Ou, {Kuang Shun}",
year = "2004",
month = "4",
day = "15",
doi = "10.1016/j.sna.2003.12.011",
language = "English",
volume = "112",
pages = "163--174",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1",

}

Equivalent strengths for reliability assessment of MEMS structures. / Chen, Kuo-Shen; Ou, Kuang Shun.

In: Sensors and Actuators, A: Physical, Vol. 112, No. 1, 15.04.2004, p. 163-174.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Equivalent strengths for reliability assessment of MEMS structures

AU - Chen, Kuo-Shen

AU - Ou, Kuang Shun

PY - 2004/4/15

Y1 - 2004/4/15

N2 - The scattering and inconsistency of tested strength of brittle microelectromechanical systems (MEMS) materials imposes a critical obstacle for structural reliability assessment of MEMS devices. In this article, the nature of such a discrepancy and the effort to solve this issue are discussed. A method based on equal failure probability is proposed to map the material strength obtained from test specimens to the equivalent strength for MEMS structural design. This conversion can be classified into three types to deal with difference in size, geometry, and applied loadings manner and the possible approach to form a material strength database for brittle MEMS material is suggested. The weakest link theory and Weibull statistics are adapted for illustrating the proposed data reduction process. Several examples are provided to illustrate the possible applications of this work. Finally, an equivalent safety factor concept is proposed to promote probabilistic structural design and the perspective to achieve a MEMS material strength database is discussed.

AB - The scattering and inconsistency of tested strength of brittle microelectromechanical systems (MEMS) materials imposes a critical obstacle for structural reliability assessment of MEMS devices. In this article, the nature of such a discrepancy and the effort to solve this issue are discussed. A method based on equal failure probability is proposed to map the material strength obtained from test specimens to the equivalent strength for MEMS structural design. This conversion can be classified into three types to deal with difference in size, geometry, and applied loadings manner and the possible approach to form a material strength database for brittle MEMS material is suggested. The weakest link theory and Weibull statistics are adapted for illustrating the proposed data reduction process. Several examples are provided to illustrate the possible applications of this work. Finally, an equivalent safety factor concept is proposed to promote probabilistic structural design and the perspective to achieve a MEMS material strength database is discussed.

UR - http://www.scopus.com/inward/record.url?scp=2142724765&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2142724765&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2003.12.011

DO - 10.1016/j.sna.2003.12.011

M3 - Article

AN - SCOPUS:2142724765

VL - 112

SP - 163

EP - 174

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 1

ER -