Erratum

Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies (Journal of Micromechanics and Microengineering (2005) 15 (1894-1903))

Kuo-Shen Chen, I. K. Lin, F. H. Ko

Research output: Contribution to journalComment/debate

1 Citation (Scopus)
Original languageEnglish
Article numberC01
Number of pages1
JournalJournal of Micromechanics and Microengineering
Volume16
Issue number7
DOIs
Publication statusPublished - 2006 Jul 1

Fingerprint

micromechanics
Micromechanics
Electron beam lithography
Polymers
lithography
electron beams
Fabrication
microstructure
Microstructure
fabrication
polymers

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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title = "Erratum: Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies (Journal of Micromechanics and Microengineering (2005) 15 (1894-1903))",
author = "Kuo-Shen Chen and Lin, {I. K.} and Ko, {F. H.}",
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AU - Ko, F. H.

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JF - Journal of Micromechanics and Microengineering

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