Evaluation of interface property and DC characteristics enhancement in nanoscale n-channel metal-oxide-semiconductor field-effect transistor using stress memorization technique

Po Chin Huang, San Lein Wu, Shoou Jinn Chang, Yao Tsung Huang, Cheng Wen Kuo, Ching Yao Chang, Yao Chin Cheng, Osbert Cheng

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Evaluation of interface property and DC characteristics enhancement in nanoscale n-channel metal-oxide-semiconductor field-effect transistor using stress memorization technique'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science