Evaluation of the gauge factor for single-walled carbon nanonets on the flexible plastic substrates by nano-transfer-printing

C. C. Hsu, Ru-Min Chao, C. W. Liu, Steven Y. Liang

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Abstract

Nano-transfer-printing (nTP) is increasingly used for the micro-fabrication of nanoscale materials onto flexible plastic substrates. This paper reports a nTP process for single-walled carbon nanonets (SWCNNs) for use in strain sensors. Traditional SWCNNs grown on a silicon substrate by alcohol catalytic chemical vapor deposition (ACCVD) can serve as strain-sensing elements in strain sensors and nano-electromechanical system (NEMS) sensors, but ACCVD is not well suited to the task. To improve SWCNN fabrication, this work deposits a parylene-C thin film on SWCNNs for transfer-printing onto flexible plastic substrates with polyimide tape. Quantification of the fabricated SWCNN strain-sensing ability (gauge factor) is performed by comparing two specimens with different pattern features and substrates. The gauge factor is measured by tensile testing. SWCNN density variations relative to the observed gauge factors are discussed. Results show that SWCNN gauge factors range from 1.46 to 8.22, depending on the substrate and pattern width. It is further observed that the gauge factor of the presented SWCNN thin film increases when the width of the SWCNN decreases to the low micro-dimensions, i.e. below 40 μm, indicating a significant scaling factor.

Original languageEnglish
Article number075012
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number7
DOIs
Publication statusPublished - 2011 Jul 1

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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