Evaluation of the gauge factor for single-walled carbon nanonets on the flexible plastic substrates by nano-transfer-printing

C. C. Hsu, Ru-Min Chao, C. W. Liu, Steven Y. Liang

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Nano-transfer-printing (nTP) is increasingly used for the micro-fabrication of nanoscale materials onto flexible plastic substrates. This paper reports a nTP process for single-walled carbon nanonets (SWCNNs) for use in strain sensors. Traditional SWCNNs grown on a silicon substrate by alcohol catalytic chemical vapor deposition (ACCVD) can serve as strain-sensing elements in strain sensors and nano-electromechanical system (NEMS) sensors, but ACCVD is not well suited to the task. To improve SWCNN fabrication, this work deposits a parylene-C thin film on SWCNNs for transfer-printing onto flexible plastic substrates with polyimide tape. Quantification of the fabricated SWCNN strain-sensing ability (gauge factor) is performed by comparing two specimens with different pattern features and substrates. The gauge factor is measured by tensile testing. SWCNN density variations relative to the observed gauge factors are discussed. Results show that SWCNN gauge factors range from 1.46 to 8.22, depending on the substrate and pattern width. It is further observed that the gauge factor of the presented SWCNN thin film increases when the width of the SWCNN decreases to the low micro-dimensions, i.e. below 40 μm, indicating a significant scaling factor.

Original languageEnglish
Article number075012
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number7
DOIs
Publication statusPublished - 2011 Jul 1

Fingerprint

Gages
Printing
Carbon
Plastics
Substrates
Chemical vapor deposition
Sensors
Alcohols
Thin films
Carbon films
Microfabrication
Tensile testing
Silicon
Polyimides
Tapes
Deposits
Fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{30800e6d7e7e4a57aad9c1940a8cca1a,
title = "Evaluation of the gauge factor for single-walled carbon nanonets on the flexible plastic substrates by nano-transfer-printing",
abstract = "Nano-transfer-printing (nTP) is increasingly used for the micro-fabrication of nanoscale materials onto flexible plastic substrates. This paper reports a nTP process for single-walled carbon nanonets (SWCNNs) for use in strain sensors. Traditional SWCNNs grown on a silicon substrate by alcohol catalytic chemical vapor deposition (ACCVD) can serve as strain-sensing elements in strain sensors and nano-electromechanical system (NEMS) sensors, but ACCVD is not well suited to the task. To improve SWCNN fabrication, this work deposits a parylene-C thin film on SWCNNs for transfer-printing onto flexible plastic substrates with polyimide tape. Quantification of the fabricated SWCNN strain-sensing ability (gauge factor) is performed by comparing two specimens with different pattern features and substrates. The gauge factor is measured by tensile testing. SWCNN density variations relative to the observed gauge factors are discussed. Results show that SWCNN gauge factors range from 1.46 to 8.22, depending on the substrate and pattern width. It is further observed that the gauge factor of the presented SWCNN thin film increases when the width of the SWCNN decreases to the low micro-dimensions, i.e. below 40 μm, indicating a significant scaling factor.",
author = "Hsu, {C. C.} and Ru-Min Chao and Liu, {C. W.} and Liang, {Steven Y.}",
year = "2011",
month = "7",
day = "1",
doi = "10.1088/0960-1317/21/7/075012",
language = "English",
volume = "21",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "7",

}

Evaluation of the gauge factor for single-walled carbon nanonets on the flexible plastic substrates by nano-transfer-printing. / Hsu, C. C.; Chao, Ru-Min; Liu, C. W.; Liang, Steven Y.

In: Journal of Micromechanics and Microengineering, Vol. 21, No. 7, 075012, 01.07.2011.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Evaluation of the gauge factor for single-walled carbon nanonets on the flexible plastic substrates by nano-transfer-printing

AU - Hsu, C. C.

AU - Chao, Ru-Min

AU - Liu, C. W.

AU - Liang, Steven Y.

PY - 2011/7/1

Y1 - 2011/7/1

N2 - Nano-transfer-printing (nTP) is increasingly used for the micro-fabrication of nanoscale materials onto flexible plastic substrates. This paper reports a nTP process for single-walled carbon nanonets (SWCNNs) for use in strain sensors. Traditional SWCNNs grown on a silicon substrate by alcohol catalytic chemical vapor deposition (ACCVD) can serve as strain-sensing elements in strain sensors and nano-electromechanical system (NEMS) sensors, but ACCVD is not well suited to the task. To improve SWCNN fabrication, this work deposits a parylene-C thin film on SWCNNs for transfer-printing onto flexible plastic substrates with polyimide tape. Quantification of the fabricated SWCNN strain-sensing ability (gauge factor) is performed by comparing two specimens with different pattern features and substrates. The gauge factor is measured by tensile testing. SWCNN density variations relative to the observed gauge factors are discussed. Results show that SWCNN gauge factors range from 1.46 to 8.22, depending on the substrate and pattern width. It is further observed that the gauge factor of the presented SWCNN thin film increases when the width of the SWCNN decreases to the low micro-dimensions, i.e. below 40 μm, indicating a significant scaling factor.

AB - Nano-transfer-printing (nTP) is increasingly used for the micro-fabrication of nanoscale materials onto flexible plastic substrates. This paper reports a nTP process for single-walled carbon nanonets (SWCNNs) for use in strain sensors. Traditional SWCNNs grown on a silicon substrate by alcohol catalytic chemical vapor deposition (ACCVD) can serve as strain-sensing elements in strain sensors and nano-electromechanical system (NEMS) sensors, but ACCVD is not well suited to the task. To improve SWCNN fabrication, this work deposits a parylene-C thin film on SWCNNs for transfer-printing onto flexible plastic substrates with polyimide tape. Quantification of the fabricated SWCNN strain-sensing ability (gauge factor) is performed by comparing two specimens with different pattern features and substrates. The gauge factor is measured by tensile testing. SWCNN density variations relative to the observed gauge factors are discussed. Results show that SWCNN gauge factors range from 1.46 to 8.22, depending on the substrate and pattern width. It is further observed that the gauge factor of the presented SWCNN thin film increases when the width of the SWCNN decreases to the low micro-dimensions, i.e. below 40 μm, indicating a significant scaling factor.

UR - http://www.scopus.com/inward/record.url?scp=79960040949&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79960040949&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/21/7/075012

DO - 10.1088/0960-1317/21/7/075012

M3 - Article

AN - SCOPUS:79960040949

VL - 21

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 7

M1 - 075012

ER -