Evolution of chemical bonding configuration in ultrathin SiOxNy layers grown by low-temperature plasma nitridation

Yi Sheng Lai, J. S. Chen

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)
Original languageEnglish
Pages (from-to)772-778
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number3
DOIs
Publication statusPublished - 2003 Jul 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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