Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti-Si-N thin films using magnetron reactive co-sputtering

C. K. Chung, H. C. Chang, S. C. Chang, M. W. Liao

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Fingerprint Dive into the research topics of 'Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti-Si-N thin films using magnetron reactive co-sputtering'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science