Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing

B. H. Wu, Chen-Kuei Chung, C. W. Lal

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The microstructure and nanomechanical behavior of diamond like carbon (DLC) films has been investigated at high temperature annealing. The DLC films with 250 nm thickness were deposited on the crystalline silicon (c-Si) substrate using ultra-high-vacuum ion beam sputtering and post thermal annealing at high temperature up to 900 °C for 0.5-J.5 hours. Raman spectra showed that the as-deposited DLC film contained tetrahedral amorphous carbon (ta-C) state and presence of increased Sp2 bonds after annealing at 900 °C. GIXRD spectra obtained for the DLC films indicated the absence of diffraction peaks at room temperature (RT) and varied vacuum annealing conditions. It indicates that the above DLC films are still amorphous at high thermal stability despite the change of bonding behaviour from primary Sp3 to more Sp2 bonding. The nanohardness and elastic modulus of the DLC films measured by continuous stiffness measurement technique in the nanoindentation decreased significantly from 29.6 and 35J.2 GPa at RT to 17.5 and 150 GPa at 900 °C, respectively which has been attributed to the graphitization of DLC films at high temperature.

Original languageEnglish
Title of host publication2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
Pages193-196
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 1
Event2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009 - Tainan, Taiwan
Duration: 2009 Oct 182009 Oct 21

Publication series

Name2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009

Other

Other2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009
CountryTaiwan
CityTainan
Period09-10-1809-10-21

Fingerprint

Diamond
Carbon
Temperature
Vacuum
Hot Temperature
Elastic Modulus
Silicon
Ions

All Science Journal Classification (ASJC) codes

  • Molecular Medicine
  • Pharmacology

Cite this

Wu, B. H., Chung, C-K., & Lal, C. W. (2009). Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing. In 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009 (pp. 193-196). [5559089] (2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009). https://doi.org/10.1109/NANOMED.2009.5559089
Wu, B. H. ; Chung, Chen-Kuei ; Lal, C. W. / Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing. 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009. 2009. pp. 193-196 (2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009).
@inproceedings{d0801da7a0664c5dbaea77668541c7ff,
title = "Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing",
abstract = "The microstructure and nanomechanical behavior of diamond like carbon (DLC) films has been investigated at high temperature annealing. The DLC films with 250 nm thickness were deposited on the crystalline silicon (c-Si) substrate using ultra-high-vacuum ion beam sputtering and post thermal annealing at high temperature up to 900 °C for 0.5-J.5 hours. Raman spectra showed that the as-deposited DLC film contained tetrahedral amorphous carbon (ta-C) state and presence of increased Sp2 bonds after annealing at 900 °C. GIXRD spectra obtained for the DLC films indicated the absence of diffraction peaks at room temperature (RT) and varied vacuum annealing conditions. It indicates that the above DLC films are still amorphous at high thermal stability despite the change of bonding behaviour from primary Sp3 to more Sp2 bonding. The nanohardness and elastic modulus of the DLC films measured by continuous stiffness measurement technique in the nanoindentation decreased significantly from 29.6 and 35J.2 GPa at RT to 17.5 and 150 GPa at 900 °C, respectively which has been attributed to the graphitization of DLC films at high temperature.",
author = "Wu, {B. H.} and Chen-Kuei Chung and Lal, {C. W.}",
year = "2009",
month = "12",
day = "1",
doi = "10.1109/NANOMED.2009.5559089",
language = "English",
isbn = "9781424455287",
series = "2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009",
pages = "193--196",
booktitle = "2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009",

}

Wu, BH, Chung, C-K & Lal, CW 2009, Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing. in 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009., 5559089, 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009, pp. 193-196, 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009, Tainan, Taiwan, 09-10-18. https://doi.org/10.1109/NANOMED.2009.5559089

Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing. / Wu, B. H.; Chung, Chen-Kuei; Lal, C. W.

2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009. 2009. p. 193-196 5559089 (2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing

AU - Wu, B. H.

AU - Chung, Chen-Kuei

AU - Lal, C. W.

PY - 2009/12/1

Y1 - 2009/12/1

N2 - The microstructure and nanomechanical behavior of diamond like carbon (DLC) films has been investigated at high temperature annealing. The DLC films with 250 nm thickness were deposited on the crystalline silicon (c-Si) substrate using ultra-high-vacuum ion beam sputtering and post thermal annealing at high temperature up to 900 °C for 0.5-J.5 hours. Raman spectra showed that the as-deposited DLC film contained tetrahedral amorphous carbon (ta-C) state and presence of increased Sp2 bonds after annealing at 900 °C. GIXRD spectra obtained for the DLC films indicated the absence of diffraction peaks at room temperature (RT) and varied vacuum annealing conditions. It indicates that the above DLC films are still amorphous at high thermal stability despite the change of bonding behaviour from primary Sp3 to more Sp2 bonding. The nanohardness and elastic modulus of the DLC films measured by continuous stiffness measurement technique in the nanoindentation decreased significantly from 29.6 and 35J.2 GPa at RT to 17.5 and 150 GPa at 900 °C, respectively which has been attributed to the graphitization of DLC films at high temperature.

AB - The microstructure and nanomechanical behavior of diamond like carbon (DLC) films has been investigated at high temperature annealing. The DLC films with 250 nm thickness were deposited on the crystalline silicon (c-Si) substrate using ultra-high-vacuum ion beam sputtering and post thermal annealing at high temperature up to 900 °C for 0.5-J.5 hours. Raman spectra showed that the as-deposited DLC film contained tetrahedral amorphous carbon (ta-C) state and presence of increased Sp2 bonds after annealing at 900 °C. GIXRD spectra obtained for the DLC films indicated the absence of diffraction peaks at room temperature (RT) and varied vacuum annealing conditions. It indicates that the above DLC films are still amorphous at high thermal stability despite the change of bonding behaviour from primary Sp3 to more Sp2 bonding. The nanohardness and elastic modulus of the DLC films measured by continuous stiffness measurement technique in the nanoindentation decreased significantly from 29.6 and 35J.2 GPa at RT to 17.5 and 150 GPa at 900 °C, respectively which has been attributed to the graphitization of DLC films at high temperature.

UR - http://www.scopus.com/inward/record.url?scp=77957990412&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77957990412&partnerID=8YFLogxK

U2 - 10.1109/NANOMED.2009.5559089

DO - 10.1109/NANOMED.2009.5559089

M3 - Conference contribution

SN - 9781424455287

T3 - 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009

SP - 193

EP - 196

BT - 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009

ER -

Wu BH, Chung C-K, Lal CW. Evolution of microstructure and nanomechanical behavior of diamond-like carbon films at high temperature annealing. In 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009. 2009. p. 193-196. 5559089. (2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2009). https://doi.org/10.1109/NANOMED.2009.5559089