Excimer Laser 輔助選擇性銅無電鍍應用於MEMS

Sheng-Chih Shen

Department of Systems and Naval Mechatronic Engineering

Research output: Contribution to journal › Article

Original language	Chinese
Journal	機械工業雜誌
Publication status	Published - 2001 Aug

Cite this

Shen, S-C. (2001). Excimer Laser 輔助選擇性銅無電鍍應用於MEMS. 機械工業雜誌.