Excimer laser micromachining of aspheric microlenses with precise surface profile control and optimal focusing capability

Yung-Chun Lee, Chun Ying Wu

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

This paper demonstrates the unique and exceptional capability of excimer laser micromachining in fabricating aspheric microlenses with precise surface profile control. A newly developed laser scanning method is introduced for machining refractive types of microlenses, which have pre-designed surface profiles aiming at minimizing the optical focal spot sizes. The machining accuracy and machined surface roughness are examined experimentally, and very good results are obtained. Optical testing on the fabricated aspheric microlenses shows significant improvement in focusing capability and the focal spot sizes are approaching optical diffraction limits. The proposed excimer laser micromachining method is flexible, versatile, and accurate, hence can be very useful and powerful in machining 3D microstructures of complex profiles and demanding profile accuracy.

Original languageEnglish
Pages (from-to)116-125
Number of pages10
JournalOptics and Lasers in Engineering
Volume45
Issue number1
DOIs
Publication statusPublished - 2007 Jan 1

Fingerprint

Microlenses
laser machining
Control surfaces
Micromachining
Excimer lasers
excimer lasers
Machining
machining
profiles
Optical testing
Diffraction
Surface roughness
Scanning
surface roughness
Microstructure
Lasers
microstructure
scanning
diffraction
lasers

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

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Excimer laser micromachining of aspheric microlenses with precise surface profile control and optimal focusing capability. / Lee, Yung-Chun; Wu, Chun Ying.

In: Optics and Lasers in Engineering, Vol. 45, No. 1, 01.01.2007, p. 116-125.

Research output: Contribution to journalArticle

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