Excimer laser three-dimensional micromachining based on image projection and the optical diffraction effect

Yu Hsuan Hung, Hung Liang Chien, Yung Chun Lee

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask pattern with various feature sizes and hole-area opening ratios. The practical feasibility of the proposed method is demonstrated by machining conical, trihedral, and pyramidal 3D microstructures on polycarbonate substrates. The proposed method greatly simplifies the photo-mask design and preparation task in traditional excimer laser 3D micromachining systems and provides a powerful technique for achieving large-area 3D microstructures with complex patterns and atypical profiles.

Original languageEnglish
Article number1690
JournalApplied Sciences (Switzerland)
Volume8
Issue number9
DOIs
Publication statusPublished - 2018 Sep 18

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Instrumentation
  • Engineering(all)
  • Process Chemistry and Technology
  • Computer Science Applications
  • Fluid Flow and Transfer Processes

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