Experimental and molecular dynamics investigations of nanoindentation- induced phase transformations in monocrystalline silicon

Yen Hung Lin, Ping Feng Yang, Sheng Rui Jian, Yi Shao Lai, Tei-Chen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents experimental and molecular dynamics approaches towards deformation and phase transformation mechanisms of monocrystalline Si(100) subjected to nanoindentation. The nanoindentation experiment was conducted with a Berkovich indenter. Following the analysis using cross-sectional transmission electron microscopy with the samples prepared by focused ion beam milling, upon pressure release, metastable Si-III and Si-XII phases were identified inside the indentation-induced deformed region beneath the indent. We also demonstrated phase distributions during loading and unloading stages of spherical and Berkovich nanoindentations through molecular dynamics simulations. By searching the presence of the fifth neighboring atom within a non-bonding length, Si-III and Si-XII have been successfully distinguished from Si-I. Crystallinity of this mixed-phase was further identified by radial distribution functions.

Original languageEnglish
Title of host publication2008 3rd International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2008
Pages44-48
Number of pages5
DOIs
Publication statusPublished - 2008 Dec 1
Event2008 3rd International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2008 - Taipei, Taiwan
Duration: 2008 Oct 222008 Oct 24

Publication series

Name2008 3rd International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2008

Other

Other2008 3rd International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2008
CountryTaiwan
CityTaipei
Period08-10-2208-10-24

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Experimental and molecular dynamics investigations of nanoindentation- induced phase transformations in monocrystalline silicon'. Together they form a unique fingerprint.

Cite this