Exploring Zn–Sn–O (ZTO) composition spreads with combinatorial sputtering

Siang Yun Li, Yun Hwei Shen, Kao Shuo Chang, Wan Yu Wu, Jyh Ming Ting

Research output: Contribution to journalArticlepeer-review


Transparent conducting oxide (TCO) thin film is extensively used as electrode in solar cell and display, owing to its high transparency and excellent conductivity. Multicomponent oxides such as Zn–Sn–O (ZTO) have attracted much attention as a result. Although there is no expensive elements in ZTO, fabrication and investigating ZTO having different ratios of Zn/Sn is costly and time consuming. In this work, we have applied the concept of combinatorial methodology to deposit alternating ZnO and SnO wedges, with the two slanted surfaces in contact, to form a thin film having uniform thickness. The ZTO thin film thus prepared has unifrom compositional spread across the film. The crystalline structure and physical property of ZTO thin film are studied. Graphical abstract: [Figure not available: see fulltext.]

Original languageEnglish
Article number342
JournalApplied Physics A: Materials Science and Processing
Issue number5
Publication statusPublished - 2023 May

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)


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