Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate

Chia Hsu Hsieh, Yi Chan Yeh, Le Quyen Ly, Guan Jie Su, Shao En Tsai, Yu Hua Ye, Yu-Cheng Lin, I. Yu Huang

Research output: Contribution to journalArticle

Abstract

Using microelectromechanical systems technology, a high-performance extended-gate field-effect transistor (EGFET)-based pesticide microsensor for organophosphorus and carbamate (CM) detection is developed. To minimize the whole pesticide-sensing system, we also integrated a planar Ti/Ag/AgCl/KCl-gel microreference electrode into the same silicon chip. The total dimensions of the proposed pesticide-sensing system are only 0.92 × 0.95 × 0.1 cm3. This EGFET-based microsensor for organophosphorus and CMs demonstrates extremely high sensitivity (194 and 268.1 mV/dec, respectively) and sensing linearity (0.993 and 0.974, respectively) and extremely low response time (120 and 300 s, respectively). The microsensor detection limit for both pesticides is 0.001 ppm.

Original languageEnglish
Article number015002
JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
Volume18
Issue number1
DOIs
Publication statusPublished - 2019 Jan 1

Fingerprint

Gates (transistor)
Microsensors
pesticides
Carbamates
Pesticides
field effect transistors
Silicon
MEMS
Gels
microelectromechanical systems
linearity
Electrodes
chips
gels
electrodes
sensitivity
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Hsieh, Chia Hsu ; Yeh, Yi Chan ; Ly, Le Quyen ; Su, Guan Jie ; Tsai, Shao En ; Ye, Yu Hua ; Lin, Yu-Cheng ; Huang, I. Yu. / Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate. In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. 2019 ; Vol. 18, No. 1.
@article{6c5d267996a04021837a78c186fd8b26,
title = "Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate",
abstract = "Using microelectromechanical systems technology, a high-performance extended-gate field-effect transistor (EGFET)-based pesticide microsensor for organophosphorus and carbamate (CM) detection is developed. To minimize the whole pesticide-sensing system, we also integrated a planar Ti/Ag/AgCl/KCl-gel microreference electrode into the same silicon chip. The total dimensions of the proposed pesticide-sensing system are only 0.92 × 0.95 × 0.1 cm3. This EGFET-based microsensor for organophosphorus and CMs demonstrates extremely high sensitivity (194 and 268.1 mV/dec, respectively) and sensing linearity (0.993 and 0.974, respectively) and extremely low response time (120 and 300 s, respectively). The microsensor detection limit for both pesticides is 0.001 ppm.",
author = "Hsieh, {Chia Hsu} and Yeh, {Yi Chan} and Ly, {Le Quyen} and Su, {Guan Jie} and Tsai, {Shao En} and Ye, {Yu Hua} and Yu-Cheng Lin and Huang, {I. Yu}",
year = "2019",
month = "1",
day = "1",
doi = "10.1117/1.JMM.18.1.015002",
language = "English",
volume = "18",
journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",
issn = "1932-5150",
publisher = "SPIE",
number = "1",

}

Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate. / Hsieh, Chia Hsu; Yeh, Yi Chan; Ly, Le Quyen; Su, Guan Jie; Tsai, Shao En; Ye, Yu Hua; Lin, Yu-Cheng; Huang, I. Yu.

In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Vol. 18, No. 1, 015002, 01.01.2019.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate

AU - Hsieh, Chia Hsu

AU - Yeh, Yi Chan

AU - Ly, Le Quyen

AU - Su, Guan Jie

AU - Tsai, Shao En

AU - Ye, Yu Hua

AU - Lin, Yu-Cheng

AU - Huang, I. Yu

PY - 2019/1/1

Y1 - 2019/1/1

N2 - Using microelectromechanical systems technology, a high-performance extended-gate field-effect transistor (EGFET)-based pesticide microsensor for organophosphorus and carbamate (CM) detection is developed. To minimize the whole pesticide-sensing system, we also integrated a planar Ti/Ag/AgCl/KCl-gel microreference electrode into the same silicon chip. The total dimensions of the proposed pesticide-sensing system are only 0.92 × 0.95 × 0.1 cm3. This EGFET-based microsensor for organophosphorus and CMs demonstrates extremely high sensitivity (194 and 268.1 mV/dec, respectively) and sensing linearity (0.993 and 0.974, respectively) and extremely low response time (120 and 300 s, respectively). The microsensor detection limit for both pesticides is 0.001 ppm.

AB - Using microelectromechanical systems technology, a high-performance extended-gate field-effect transistor (EGFET)-based pesticide microsensor for organophosphorus and carbamate (CM) detection is developed. To minimize the whole pesticide-sensing system, we also integrated a planar Ti/Ag/AgCl/KCl-gel microreference electrode into the same silicon chip. The total dimensions of the proposed pesticide-sensing system are only 0.92 × 0.95 × 0.1 cm3. This EGFET-based microsensor for organophosphorus and CMs demonstrates extremely high sensitivity (194 and 268.1 mV/dec, respectively) and sensing linearity (0.993 and 0.974, respectively) and extremely low response time (120 and 300 s, respectively). The microsensor detection limit for both pesticides is 0.001 ppm.

UR - http://www.scopus.com/inward/record.url?scp=85062626383&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85062626383&partnerID=8YFLogxK

U2 - 10.1117/1.JMM.18.1.015002

DO - 10.1117/1.JMM.18.1.015002

M3 - Article

AN - SCOPUS:85062626383

VL - 18

JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

SN - 1932-5150

IS - 1

M1 - 015002

ER -