Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate

Chia Hsu Hsieh, Yi Chan Yeh, Le Quyen Ly, Guan Jie Su, Shao En Tsai, Yu Hua Ye, Yu Cheng Lin, I. Yu Huang

Research output: Contribution to journalArticlepeer-review

Abstract

Using microelectromechanical systems technology, a high-performance extended-gate field-effect transistor (EGFET)-based pesticide microsensor for organophosphorus and carbamate (CM) detection is developed. To minimize the whole pesticide-sensing system, we also integrated a planar Ti/Ag/AgCl/KCl-gel microreference electrode into the same silicon chip. The total dimensions of the proposed pesticide-sensing system are only 0.92 × 0.95 × 0.1 cm3. This EGFET-based microsensor for organophosphorus and CMs demonstrates extremely high sensitivity (194 and 268.1 mV/dec, respectively) and sensing linearity (0.993 and 0.974, respectively) and extremely low response time (120 and 300 s, respectively). The microsensor detection limit for both pesticides is 0.001 ppm.

Original languageEnglish
Article number015002
JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
Volume18
Issue number1
DOIs
Publication statusPublished - 2019 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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