Fabricating of aspheric micro-lens array by excimer laser micromachining

Chi Cheng Chiu, Yung-Chun Lee

Research output: Contribution to journalArticlepeer-review

30 Citations (Scopus)


This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed.

Original languageEnglish
Pages (from-to)1232-1237
Number of pages6
JournalOptics and Lasers in Engineering
Issue number9-10
Publication statusPublished - 2011 Sep 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Mechanical Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'Fabricating of aspheric micro-lens array by excimer laser micromachining'. Together they form a unique fingerprint.

Cite this