Fabricating of aspheric micro-lens array by excimer laser micromachining

Chi Cheng Chiu; Yung Chun Lee

doi:10.1016/j.optlaseng.2011.04.011

Fabricating of aspheric micro-lens array by excimer laser micromachining

Research output: Contribution to journal › Article › peer-review

Abstract

This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed.

Original language	English
Pages (from-to)	1232-1237
Number of pages	6
Journal	Optics and Lasers in Engineering
Volume	49
Issue number	9-10
DOIs	https://doi.org/10.1016/j.optlaseng.2011.04.011
Publication status	Published - 2011 Sept

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1016/j.optlaseng.2011.04.011

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abstract = "This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed.",

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year = "2011",

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doi = "10.1016/j.optlaseng.2011.04.011",

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AB - This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed.

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IS - 9-10

ER -

Fabricating of aspheric micro-lens array by excimer laser micromachining

Abstract

All Science Journal Classification (ASJC) codes

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