Fabrication and analysis of a Si/Si0.55Ge0.45 heterojunction line tunnel FET

Amey M. Walke, Anne Vandooren, Rita Rooyackers, Daniele Leonelli, Andriy Hikavyy, Roger Loo, Anne S. Verhulst, Kuo Hsing Kao, Cedric Huyghebaert, Guido Groeseneken, Valipe Ramgopal Rao, Krishna K. Bhuwalka, Marc M. Heyns, Nadine Collaert, Aaron Voon Yew Thean

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83 Citations (Scopus)


This paper presents a new integration scheme to fabricate a Si/Si 0.55 Ge0.45 heterojunction line tunnel field effect transistor (TFET). The device shows an increase in tunneling current with gate length. The 1-μm gate length device shows on current in excess of 20 μA/μm at VGS=VDS=1.2~V. Low-temperature measurements, performed to suppress trap-assisted tunneling (TAT), reveal the point subthreshold swing as low as 22 mV/dec at 78 K. Field-induced quantum confinement effects are found to increase the tunneling onset voltage by ∼0.35~V. Variation of the tunneling onset voltage measured experimentally is correlated to variation in the pocket thickness and its doping concentration. Small geometry devices were found to be more susceptible to microvariations in the pocket thickness and doping concentration.

Original languageEnglish
Article number6727530
Pages (from-to)707-715
Number of pages9
JournalIEEE Transactions on Electron Devices
Issue number3
Publication statusPublished - 2014 Mar

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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