Fabrication and analysis of valve-less micro pumps

Nan Chyuan Tsai, Wei Ming Huang, Chao Wen Chiang, Rong Mao Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


Due to dramatic progress in microfluidic devices and their applications, the development of microfluidic systems become more and more pertinent in recent years, such as fluidic activation devices, micro-sensors and micro-pumps. In this research, micro-electro-mechanical fabrication technologies are employed to fabricate an innovative valve-less micro-pump under magnetic control. The micro-coil is fabricated by electroforming and utilized to generate control force. Prior to fabrication of micro-pump, commercial software CFD-RC and ANSOFT are used first to simulate the performance of the designed micro-pump. CFD-RC is to observe the flow field and pressure in the micro-channel, and ANSOFT to evaluate if the magnetic force is sufficient enough to activate the membrane of the micro-pump. Finally, the micro-pump is equipped with a personal computer, in which dSPACE simulation module DS1104 is embedded, to realize the closed-loop micro-system.

Original languageEnglish
Title of host publicationProgress in Electromagnetics Research Symposium 2008, PIERS 2008 Hangzhou
PublisherElectromagnetics Academy
Number of pages5
ISBN (Print)9781618390530
Publication statusPublished - 2008 Jan 1
EventProgress in Electromagnetics Research Symposium 2008, PIERS 2008 Hangzhou - Hangzhou, China
Duration: 2008 Mar 242008 Mar 28

Publication series

NameProgress in Electromagnetics Research Symposium
ISSN (Print)1559-9450


OtherProgress in Electromagnetics Research Symposium 2008, PIERS 2008 Hangzhou

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials


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