TY - GEN
T1 - Fabrication and analysis of valve-less micro pumps
AU - Tsai, Nan Chyuan
AU - Huang, Wei Ming
AU - Chiang, Chao Wen
AU - Lee, Rong Mao
PY - 2008/1/1
Y1 - 2008/1/1
N2 - Due to dramatic progress in microfluidic devices and their applications, the development of microfluidic systems become more and more pertinent in recent years, such as fluidic activation devices, micro-sensors and micro-pumps. In this research, micro-electro-mechanical fabrication technologies are employed to fabricate an innovative valve-less micro-pump under magnetic control. The micro-coil is fabricated by electroforming and utilized to generate control force. Prior to fabrication of micro-pump, commercial software CFD-RC and ANSOFT are used first to simulate the performance of the designed micro-pump. CFD-RC is to observe the flow field and pressure in the micro-channel, and ANSOFT to evaluate if the magnetic force is sufficient enough to activate the membrane of the micro-pump. Finally, the micro-pump is equipped with a personal computer, in which dSPACE simulation module DS1104 is embedded, to realize the closed-loop micro-system.
AB - Due to dramatic progress in microfluidic devices and their applications, the development of microfluidic systems become more and more pertinent in recent years, such as fluidic activation devices, micro-sensors and micro-pumps. In this research, micro-electro-mechanical fabrication technologies are employed to fabricate an innovative valve-less micro-pump under magnetic control. The micro-coil is fabricated by electroforming and utilized to generate control force. Prior to fabrication of micro-pump, commercial software CFD-RC and ANSOFT are used first to simulate the performance of the designed micro-pump. CFD-RC is to observe the flow field and pressure in the micro-channel, and ANSOFT to evaluate if the magnetic force is sufficient enough to activate the membrane of the micro-pump. Finally, the micro-pump is equipped with a personal computer, in which dSPACE simulation module DS1104 is embedded, to realize the closed-loop micro-system.
UR - http://www.scopus.com/inward/record.url?scp=84898956753&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84898956753&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84898956753
SN - 9781618390530
T3 - Progress in Electromagnetics Research Symposium
SP - 1241
EP - 1245
BT - Progress in Electromagnetics Research Symposium 2008, PIERS 2008 Hangzhou
PB - Electromagnetics Academy
T2 - Progress in Electromagnetics Research Symposium 2008, PIERS 2008 Hangzhou
Y2 - 24 March 2008 through 28 March 2008
ER -