Fabrication and application of GaAs-on-insulator structure prepared through liquid-phase chemical-enhanced oxidation

Yi Shiang Chen, Ching Yi Kao, Kuan Wei Lee, Yeong Her Wang

Research output: Contribution to journalArticle

Abstract

This paper details the fabrication and characteristics of Schottky-gate InGaP/InGaAs pseudomorphic high-electron-mobility transistors (PHEMTs) with GaAs-on-insulator (GOI) structure obtained using liquid-phase chemical-enhanced oxidation (LPCEO). Two oxidation times were investigated, and the PHEMT with GOI structure prepared through 15 min of LPCEO was discovered to have improved subthreshold characteristics, suppressed gate leakage current density, larger breakdown voltage, and less low-frequency noise owing to the isolated oxide film. Therefore, the proposed PHEMT with GOI structure prepared through LPCEO is promising for group III-V compound device applications.

Original languageEnglish
Article number109007
JournalVacuum
Volume171
DOIs
Publication statusPublished - 2020 Jan

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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