Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Two different microlenses with spherical and aspheric surfaces profiles with dimension less than 200 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.

Original languageEnglish
Title of host publicationProgress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
PublisherTrans Tech Publications Ltd
Pages67-72
Number of pages6
EditionPART 1
ISBN (Print)0878499903, 9780878499908
DOIs
Publication statusPublished - 2006 Jan 1
Event2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
Duration: 2005 Nov 282005 Dec 2

Publication series

NameMaterials Science Forum
NumberPART 1
Volume505-507
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other2005 International Conference on Advanced Manufacture, ICAM2005
CountryTaiwan
CityTaipei, R.O.C.
Period05-11-2805-12-02

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Lee, Y. C., & Wu, C. Y. (2006). Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. In Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture (PART 1 ed., pp. 67-72). (Materials Science Forum; Vol. 505-507, No. PART 1). Trans Tech Publications Ltd. https://doi.org/10.4028/0-87849-990-3.67