Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

Yung Chun Lee; Chun Ying Wu; Ling Sheng Jang; Yi Chu Hsu

Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

Yung Chun Lee
, Chun Ying Wu
, Ling Sheng Jang
, Yi Chu Hsu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Five different microlenses with spherical and parabolic surfaces profiles with dimension less than 500 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1375-1379
Number of pages	5
Publication status	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	2

Other

Other	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	05-06-05 → 05-06-09

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

Lee, Y. C., Wu, C. Y., Jang, L. S., & Hsu, Y. C. (2005). Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1375-1379). Article 3E4.20 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).

Lee, Yung Chun ; Wu, Chun Ying ; Jang, Ling Sheng et al. / Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1375-1379 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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title = "Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method",

abstract = "This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Five different microlenses with spherical and parabolic surfaces profiles with dimension less than 500 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.",

author = "Lee, \{Yung Chun\} and Wu, \{Chun Ying\} and Jang, \{Ling Sheng\} and Hsu, \{Yi Chu\}",

year = "2005",

language = "English",

isbn = "0780389948",

series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",

pages = "1375--1379",

booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

}

Lee, YC, Wu, CY, Jang, LS & Hsu, YC 2005, Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 3E4.20, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 2, pp. 1375-1379, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05-06-05.

Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. / Lee, Yung Chun; Wu, Chun Ying; Jang, Ling Sheng et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1375-1379 3E4.20 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

AU - Lee, Yung Chun

AU - Wu, Chun Ying

AU - Jang, Ling Sheng

AU - Hsu, Yi Chu

PY - 2005

Y1 - 2005

N2 - This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Five different microlenses with spherical and parabolic surfaces profiles with dimension less than 500 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.

AB - This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Five different microlenses with spherical and parabolic surfaces profiles with dimension less than 500 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.

UR - https://www.scopus.com/pages/publications/27544460681

UR - https://www.scopus.com/pages/publications/27544460681#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:27544460681

SN - 0780389948

T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

SP - 1375

EP - 1379

BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

Lee YC, Wu CY, Jang LS, Hsu YC. Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1375-1379. 3E4.20. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

Abstract

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All Science Journal Classification (ASJC) codes

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