Fabrication and design of a heat transfer micro channel system at low temperature process by MEMS technique

C. W. Liu, Chie Gau, C. S. Yang, B. T. Dai

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

The current work provides a low temperature fabrication technique for a micro channel system that a low thermal conductivity material can be used to form the channel wall. This channel can provide a uniform heat flux boundary condition and a well insulation on the wall to prevent heat loss from the channel to the outside ambient. Therefore, detailed micro-scale flow and heat transfer process and information along the channel can be studied. Design consideration and fabrication techniques involved in this processes will be discussed. A final measurement for the validation of the heaters and the sensors fabricated and a study of the heat transfer coefficient distributions inside the micro channel will be presented.

Original languageEnglish
Pages623-626
Number of pages4
Publication statusPublished - 2004 Dec 1
EventIEEE Sensors 2004 - Vienna, Austria
Duration: 2004 Oct 242004 Oct 27

Other

OtherIEEE Sensors 2004
Country/TerritoryAustria
CityVienna
Period04-10-2404-10-27

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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