Fabrication and design of a heat transfer micro-channel system by a low temperature MEMS technique

H. S. Ko, C. W. Liu, C. Gau, C. S. Yang

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


This work describes a low temperature fabrication technique for a micro-channel configuration that is integrated with an array of temperature sensors and micro-heaters. This channel configuration can be used to study the micro-scale heat transfer process in the channels. The low temperature fabrication process enables the use of low thermal conductivity material for forming the channel walls. This can provide a uniform heat flux boundary condition due to adequate insulation for reducing both the heat loss from the channel to the surrounding ambient and the streamwise conduction. In addition, the wall roughness of the micro-channel is minimized by a special wet etch process. Therefore, more accurate local heat transfer data along the channel can be obtained, which provides entry length heat transfer information for the first time in the literature. Design consideration and fabrication techniques used in this study are explained. Final measurements for validation of the fabricated heaters and sensors are presented. The paper also presents averaged heat transfer which is compared with available data. Discrepancies between different works can be clarified.

Original languageEnglish
Article number019
Pages (from-to)983-993
Number of pages11
JournalJournal of Micromechanics and Microengineering
Issue number5
Publication statusPublished - 2007 May 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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