Fabrication and emission characteristic of InGaN/GaN multiple quantum wells nanorods

T. H. Hsueh, Y. S. Chang, F. Lai, H. W. Huang, M. C. Ou-yang, C. W. Chang, H. C. Kuo, S. C. Wang, J. K. Sheu

Research output: Contribution to journalConference articlepeer-review

Abstract

InGaN/GaN multiple quantum wells (MQWs) nanorods with 100 nm in diameter were fabricated by inductively coupled plasma (ICP) etching. The nanorods show large blue-shift in peak photoluminescence emission wavelength compared to that of the bulk emission.

Original languageEnglish
Pages (from-to)607-608
Number of pages2
JournalOSA Trends in Optics and Photonics Series
Volume97
Publication statusPublished - 2004
EventInternational Quantum Electronics Conference, IQEC - San Francisco, CA, United States
Duration: 2004 May 212004 May 26

All Science Journal Classification (ASJC) codes

  • General Engineering

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