Fabrication and performance assessment of a novel stress sensor applied for micro-robotics

Yu Ming Huang, Nan Chyuan Tsai, Jing Yao Lai

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


An innovative tactile sensor is analyzed and verified by intensive experiments. By using micro-cantilever beams, on which the strain gauge layers (Pt/Ti) are deposited, the corresponding induced strains can be detected and converted into electric resistance change, with respect to either applied normal stress or shear stress. The four micro-cantilever beams are allocated in the fashion such that any adjacent beams are perpendicular to each other to decouple any potential measure discrepancy due to nonideal orthogonality. In addition, the micro-cantilever beams are curled before hands so that they can concurrently detect normal stress and shear stress. To be protected from being damaged by strong stress, the curled cantilever beams are covered up by elastomer material. Therefore, the microtactile sensor can detect normal stress up to 250 kPa and shear stress up to 35 kPa. Besides, since the elastomer is made of PDMS, which is of high bio-compatibility, the tactile sensor can be used to directly contact with human body. By taking the design and fabrication parameters into account, the curled micro-cantilever beams, which is of multi-layer structure by polymer/Pt/Ti/Si, can be produced with high yield rate. Finally, the efficacy of the tactile sensor is verified by experiments via a micro-manipulator, a highresolution microscope and a force sensor for calibration.

Original languageEnglish
Pages (from-to)1719-1725
Number of pages7
JournalMicrosystem Technologies
Issue number10
Publication statusPublished - 2010 Oct 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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