Fabrication and property of titanium dioxide thin film using sol-gel method and CO2 laser annealing

C. K. Chung, S. L. Lin, K. P. Chuang, S. Y. Cheng, K. Y. Shei

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


In this Letter, the sol-gel method and CO2 laser annealing are combined as an effective process for studying phase formation and the hydrophilic property of TiO2 thin film. X-ray diffraction patterns reveal that phase transformation can be controlled by sol-gel solution or laser power. ANSYS software was used to analyse the temperature field during laser treatment processing to confirm the phase transformation temperature of TiO 2 for anatase at 350°C and rutile at 800°C. Contact angle is an index of hydrophilicity of films and related to laser power. As laser power increases from 0.5 to 3.0W, the contact angle of the film decreased from 70° to 45°because of the enhanced hydrophilicity. The photoluminescence (PL) property of the laser annealed films was also studied to find wavelengths of 350-800nm. The wide PL can be deconvoluted into different peaks that were attributed to the lattice emission, deep-level emissions from oxygen vacancies and defect states. This combined processing offers an easy way for the fabrication of hydrophilic and wide PL TiO2 with merits of larger area, selective treatment and low cost.

Original languageEnglish
Pages (from-to)701-704
Number of pages4
JournalMicro and Nano Letters
Issue number8
Publication statusPublished - 2012 Aug 1

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Fabrication and property of titanium dioxide thin film using sol-gel method and CO<sub>2</sub> laser annealing'. Together they form a unique fingerprint.

Cite this