TY - JOUR
T1 - Fabrication of 3-D submicron glass structures by FIB
AU - Chao, C. H.
AU - Shen, S. C.
AU - Wu, J. R.
N1 - Funding Information:
The authors would like to thank the Center for Nanoscience & Nanotechnology, National Sun Yat-Sen University, Kaoshiung, Taiwan, for equipment access and technical support, and National Science Council (NSC) for their financial supports to the project (Grant numbers: NSC97-2218-E-006-009, NSC94-2213-E-110-043, NSC 94-2212-E110-015, NSC94-2622-E-110-017-CC3, and NSC95-2221-E-110-011-). The authors would like to thank the Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan, for equipment access and technical support as well.
PY - 2009/10
Y1 - 2009/10
N2 - The fabrication characteristic of focused ion beam (FIB) for Pyrex glass was investigated. FIB has several advantages such as high resolution, high material removal rates, low forward scattering, and direct fabrication in selective area without any etching mask. In this study, FIB-etched Pyrex glass was used for fast fabrication of 3-D submicron structures. A glass structure with 0.39 μm in width was fabricated. The experimental results in terms of limiting beam size, ion dose (ion/cm 2), and beam current are discussed. The influence of XeF 2 gas on FIB glass fabrication was investigated.
AB - The fabrication characteristic of focused ion beam (FIB) for Pyrex glass was investigated. FIB has several advantages such as high resolution, high material removal rates, low forward scattering, and direct fabrication in selective area without any etching mask. In this study, FIB-etched Pyrex glass was used for fast fabrication of 3-D submicron structures. A glass structure with 0.39 μm in width was fabricated. The experimental results in terms of limiting beam size, ion dose (ion/cm 2), and beam current are discussed. The influence of XeF 2 gas on FIB glass fabrication was investigated.
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U2 - 10.1007/s11665-008-9318-1
DO - 10.1007/s11665-008-9318-1
M3 - Article
AN - SCOPUS:70349216548
SN - 1059-9495
VL - 18
SP - 878
EP - 885
JO - Journal of Materials Engineering and Performance
JF - Journal of Materials Engineering and Performance
IS - 7
ER -