Fabrication of 3-D submicron glass structures by FIB

C. H. Chao, S. C. Shen, J. R. Wu

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

The fabrication characteristic of focused ion beam (FIB) for Pyrex glass was investigated. FIB has several advantages such as high resolution, high material removal rates, low forward scattering, and direct fabrication in selective area without any etching mask. In this study, FIB-etched Pyrex glass was used for fast fabrication of 3-D submicron structures. A glass structure with 0.39 μm in width was fabricated. The experimental results in terms of limiting beam size, ion dose (ion/cm 2), and beam current are discussed. The influence of XeF 2 gas on FIB glass fabrication was investigated.

Original languageEnglish
Pages (from-to)878-885
Number of pages8
JournalJournal of Materials Engineering and Performance
Volume18
Issue number7
DOIs
Publication statusPublished - 2009 Oct

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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