Fabrication of a complicated heat transfer MicroChannel system for CPU cooling study

H. T. Chen, C. W. Liu, S. G. Liu, C. S. Yang, C. Gau

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Fabrication of a temperature sensor array and a heater in a complicated heat transfer microchannel system, on a glass substrate, is presented. In addition to the glass substrate, low thermal conductivity materials such as SU-8, PMMA plate are selected to form the micro channel wall to provide good thermal insulation. Both the titanium and the platinum are deposited sequentially on a glass plate and made into heater and sensors, respectively. Lift-off method is used to obtain the desired pattern for heater and sensors. The fabrication process is much simpler than those reported in literature. Design consideration and fabrication techniques involved in this processes is discussed. Finally, validation of the heaters and sensors fabricated and a measurement of the heat transfer coefficient distributions inside the micro channel is presented.

Original languageEnglish
Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages654-658
Number of pages5
DOIs
Publication statusPublished - 2007 Aug 28
Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
Duration: 2007 Jan 162007 Jan 19

Publication series

NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
CountryThailand
CityBangkok
Period07-01-1607-01-19

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

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