Fabrication of BaTiO3 thin films and microdot patterns by halide-free nonaqueous solution route

Hajime Wagata, Takaaki Taniguchi, Ruwan Gallage, A. K. Subramani, Naonori Sakamoto, Tomoaki Watanabe, Masahiro Yoshimura, Nobuhiro Matsushita

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

This paper reports on the fabrication of barium titanate (BaTiO 3) thin films using a precursor solution containing Ba and Ti alkoxides. l-proline was used to prevent the precipitation of Ba and Ti alkoxides in a mixed solvent of ethanol and butylcarbitol under ambient conditions. Analysis of X-ray diffraction and Raman spectra revealed that the as-deposited amorphous film crystallized into a tetragonal BaTiO3 phase after annealing at 650°C in air. Scanning electron microscopic observations showed that the BaTiO3 film was free from cracks even after annealing and exhibited good adhesion to the substrate. Because the precursor solution developed was sufficiently stable in air, dot patterning of BaTiO3 was also performed using an inkjet system.

Original languageEnglish
Pages (from-to)381-386
Number of pages6
JournalJournal of the American Ceramic Society
Volume93
Issue number2
DOIs
Publication statusPublished - 2010 Feb 1

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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