Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application

Chen-Kuei Chung, K. L. Sher, Y. J. Syu, C. C. Cheng

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15 Citations (Scopus)


The microlens array is usually formed by thermal reflow of polymer disks and can be one microstructure of the light guide plate (LGP). Here, we propose an ultraviolet (UV) backside exposure technology to fabricate the photoresist cone-like microstructure on the PMMA substrate at room temperature and then use UVLIGA-like process to transfer the microstructure for the application of 3.6 in. (72 mm × 57.5 mm) LGP. The electroforming was used to transfer UV master mold to the inverse cone-like microstructure of nickel metal mold and then hot embossing was used for one more pattern transfer to the same cone-like microstructure on PMMA substrate. The optical microscope and alpha-stepper profiler were used to examine the morphology and profile of LGP microstructure. The optical luminance and uniformity of LGP were measured using BM9 luminance meter in comparison with commercial product. The light uniformity and luminance of the cone-like LGP microstructure reach 75-80% and 2,800-3,000 cd/cm 2, respectively which meet the requirements of commercial LGP.

Original languageEnglish
Pages (from-to)1619-1624
Number of pages6
JournalMicrosystem Technologies
Issue number8-9
Publication statusPublished - 2010 Aug 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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