Fabrication of flexible light guide plate using CO2 laser LIGA-like technology

Chen-Kuei Chung, Y. J. Syu, H. Y. Wang, C. C. Cheng, S. L. Lin, K. Z. Tu

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


The liquid crystal display (LCD) needs the back light module (BLM) for the light source. The light guide plate (LGP) is the main component of BLM to spread light source to the whole LCD surface and requires for the generation trend of lightweight, easy to carry, and bendable for LCD. In this article, we have demonstrated the fabrication of flexible LGP using CO2 laser LIGA-like technology which includes the laser ablation of micro-groove polymethylmethacrylate (PMMA) master mold, pouring polydimethylsiloxane (PDMS) to the mold and casting the micro-groove microstructure for flexible LGP application. Different laser powers and micro-groove pitches were used to ablate the PMMA mold with varied groove depths and taper angles. Optical microscope was used to examine the morphology and profile of the final bendable LGP microstructure. Under the varied laser power of 1-12 W, the mean taper angles of PMMA micro-grooves ranged from 28 to 70 and the etching depths were from 44.5 to 281.8 μm. The flexible PDMS LGP had good microstructure duplication after casting. The optical uniformity and luminance of flexible LGP was concerned with structure of micro-grooves and measured using BM9 luminance meter. The maximal light uniformity and average luminance of LGP at some microstructure reaches 75 % and 119 cd/m2, respectively.

Original languageEnglish
Pages (from-to)439-443
Number of pages5
JournalMicrosystem Technologies
Issue number3
Publication statusPublished - 2013 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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