Fabrication of hexagonally arrayed micro-structures with axially symmetrical surface profile by tri-axial excimer laser scanning

Chi Cheng Chiu, Yung-Chun Lee

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper presents an excimer laser contour scanning method for achieving hexagonally arrayed micro-structures with an axially symmetrical surface profile. It utilizes a specially designed contour mask for projected laser scanning along three different directions separated by 120 on the surface of a sample. Through rigorous analysis, a new contour mask design method is proposed which guarantees not only the profile accuracy but also the axial-symmetry of machined micro-structures. Experiments have been carried out using a 248 nm KrF excimer laser micromachining system. Hexagonal arrays of micro-lenses with an aperture size of 100 μm in diameter and a maximum sag height from 15 to 30 μm are successfully produced using designed contour masks. The machined profile accuracy is better than ±0.5 μm within most of the central area of lens aperture. The flexibility on machined surface profile and its machining accuracy allow new types of micro-lens arrays with specific optical functions and new applications in the future.

Original languageEnglish
Pages (from-to)15-21
Number of pages7
JournalInternational Journal of Machine Tools and Manufacture
Volume70
DOIs
Publication statusPublished - 2013 Apr 30

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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