Fabrication of metallic micro/nano-particles by surface patterning and pulsed laser annealing

Chun Hung Chen; Yung Chun Lee

doi:10.1016/j.tsf.2010.01.034

Fabrication of metallic micro/nano-particles by surface patterning and pulsed laser annealing

Chun Hung Chen, Yung Chun Lee

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

This paper presents a method for fabricating metallic micro/nano-particles with precisely controlled particle size and spherically round shape. The key elements in this method are pre-fabricated holes in micro/nano-scale on a substrate, a subsequently deposited anti-adhesion layer and a metal layer on the bottom surfaces of the holes, and a rapid thermal annealing process by high-power short laser pulses. Metallic particles can quickly form inside the holes after laser annealing, while the particle size is determined by the bottom area size of the holes and the deposited film thickness. Highly ordered metal particles with various diameters ranging from 100 nm to 300 nm can be easily obtained.

Original language	English
Pages (from-to)	4786-4790
Number of pages	5
Journal	Thin Solid Films
Volume	518
Issue number	17
DOIs	https://doi.org/10.1016/j.tsf.2010.01.034
Publication status	Published - 2010 Jun 30

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2010.01.034

Cite this

@article{3d85e1f688b94989a0324bd3bf547cdd,

title = "Fabrication of metallic micro/nano-particles by surface patterning and pulsed laser annealing",

abstract = "This paper presents a method for fabricating metallic micro/nano-particles with precisely controlled particle size and spherically round shape. The key elements in this method are pre-fabricated holes in micro/nano-scale on a substrate, a subsequently deposited anti-adhesion layer and a metal layer on the bottom surfaces of the holes, and a rapid thermal annealing process by high-power short laser pulses. Metallic particles can quickly form inside the holes after laser annealing, while the particle size is determined by the bottom area size of the holes and the deposited film thickness. Highly ordered metal particles with various diameters ranging from 100 nm to 300 nm can be easily obtained.",

author = "Chen, {Chun Hung} and Lee, {Yung Chun}",

note = "Funding Information: This research was supported by the National Science Council of Taiwan under grant NSC 97-3114-M-006-001 . The authors would like to thank the National Nano-Device Laboratories, Hsinchu, Taiwan, for equipment access and technical support.",

year = "2010",

month = jun,

day = "30",

doi = "10.1016/j.tsf.2010.01.034",

language = "English",

volume = "518",

pages = "4786--4790",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "17",

}

TY - JOUR

T1 - Fabrication of metallic micro/nano-particles by surface patterning and pulsed laser annealing

AU - Chen, Chun Hung

AU - Lee, Yung Chun

N1 - Funding Information: This research was supported by the National Science Council of Taiwan under grant NSC 97-3114-M-006-001 . The authors would like to thank the National Nano-Device Laboratories, Hsinchu, Taiwan, for equipment access and technical support.

PY - 2010/6/30

Y1 - 2010/6/30

N2 - This paper presents a method for fabricating metallic micro/nano-particles with precisely controlled particle size and spherically round shape. The key elements in this method are pre-fabricated holes in micro/nano-scale on a substrate, a subsequently deposited anti-adhesion layer and a metal layer on the bottom surfaces of the holes, and a rapid thermal annealing process by high-power short laser pulses. Metallic particles can quickly form inside the holes after laser annealing, while the particle size is determined by the bottom area size of the holes and the deposited film thickness. Highly ordered metal particles with various diameters ranging from 100 nm to 300 nm can be easily obtained.

AB - This paper presents a method for fabricating metallic micro/nano-particles with precisely controlled particle size and spherically round shape. The key elements in this method are pre-fabricated holes in micro/nano-scale on a substrate, a subsequently deposited anti-adhesion layer and a metal layer on the bottom surfaces of the holes, and a rapid thermal annealing process by high-power short laser pulses. Metallic particles can quickly form inside the holes after laser annealing, while the particle size is determined by the bottom area size of the holes and the deposited film thickness. Highly ordered metal particles with various diameters ranging from 100 nm to 300 nm can be easily obtained.

UR - http://www.scopus.com/inward/record.url?scp=77955652617&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77955652617&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2010.01.034

DO - 10.1016/j.tsf.2010.01.034

M3 - Article

AN - SCOPUS:77955652617

SN - 0040-6090

VL - 518

SP - 4786

EP - 4790

JO - Thin Solid Films

JF - Thin Solid Films

IS - 17

ER -

Fabrication of metallic micro/nano-particles by surface patterning and pulsed laser annealing

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this