We have investigated the crystallization of amorphous Y-Ba-Cu-O films with pulsed laser irradiation. The Y-Ba-Cu-O films were prepared on Si (001) substrates by pulsed laser deposition at room temperature. The microstructure and surface morphology of the films during the crystallization process were studied by x-ray diffraction and scanning electron microscopy. Micro or submicro Y-Ba-Cu-O crystalline particles can be obtained with variant laser pulses and energy densities. The particles have half-spherical or even spherical shapes on the film surfaces, and the saturated particle sizes were found to be determined by the film thickness.
|Number of pages
|Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|Published - 2000 Sept
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films