Fabrication of micro and submicro Y-Ba-Cu-O particles by excimer laser processing

G. P. Luo, C. L. Chen, S. Y. Chen, J. Shen, Y. S. Wang, Y. Y. Sun, C. W. Chu, Y. Liou, N. B. Ming

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


We have investigated the crystallization of amorphous Y-Ba-Cu-O films with pulsed laser irradiation. The Y-Ba-Cu-O films were prepared on Si (001) substrates by pulsed laser deposition at room temperature. The microstructure and surface morphology of the films during the crystallization process were studied by x-ray diffraction and scanning electron microscopy. Micro or submicro Y-Ba-Cu-O crystalline particles can be obtained with variant laser pulses and energy densities. The particles have half-spherical or even spherical shapes on the film surfaces, and the saturated particle sizes were found to be determined by the film thickness.

Original languageEnglish
Pages (from-to)2598-2602
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number5
Publication statusPublished - 2000 Sept

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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