Fabrication of microfluidic devices for packaging CMOS MEMS impedance sensors

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4 Citations (Scopus)


This work presents a polydimethylsiloxane (PDMS) microfluidic device for packaging CMOS MEMS impedance sensors. The wrinkle electrodes are fabricated on PDMS substrates to ensure a connection between the pads of the sensor and the impedance instrument. The PDMS device can tolerate an injection speed of 27.12 ml/h supplied by a pump. The corresponding pressure is 643.35 Pa. The bonding strength of the device is 32.44 g/mm2. In order to demonstrate the feasibility of the device, the short circuit test and impedance measurements for air, de-ionized water, phosphate buffered saline (PBS) at four concentrations (1, 2 × 10-4, 1 × 10-4, and 6.7 × 10-5M) were performed. The experimental results show that the developed device integrated with a sensor can differentiate various samples.

Original languageEnglish
Pages (from-to)869-875
Number of pages7
JournalMicrofluidics and Nanofluidics
Issue number6
Publication statusPublished - 2009 Dec

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry


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