Fabrication of NOx gas sensors using In2O 3-ZnO composite thin films

Chia Yu Lin, Yueh Yuan Fang, Chii Wann Lin, Craig A. Jeffrey, James J. Tunney, Kuo Chuan Ho

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In2O3-ZnO composite thin films were fabricated and their NOx sensing characteristics were investigated in this study. The content of ZnO in In2O3-ZnO thin film was controlled by adjusting the Zn2+/In3+ molar ratio (r) during the film preparation. The results showed that the incorporation of ZnO into the In 2O3 thin film can greatly improve the sensor reponse to NOx at operation temperature below 200 oC. However, as the ZnO content was further increased, the grain of the composite film started to merge into big ones, and thus decreased the surface area, resulting in lower sensor responses. The detection limit (S/N=3) of In2O3-ZnO composite film (r=0.67) reached 12 ppb at 150 °C. Both pure In2O3 and In2O3-ZnO composit films (r=0.67) showed no response to CO gas.

Original languageEnglish
Title of host publicationOlfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN
Number of pages4
Publication statusPublished - 2009
Event13th International Symposium on Olfaction and Electronic Nose, ISOEN - Brescia, Italy
Duration: 2009 Apr 152009 Apr 17

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Other13th International Symposium on Olfaction and Electronic Nose, ISOEN

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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