Fabrication of NOx gas sensors using In2O3-ZnO composite films

Chia Yu Lin; Yueh Yuan Fang; Chii Wann Lin; James J. Tunney; Kuo Chuan Ho

doi:10.1016/j.snb.2010.02.040

Fabrication of NO_x gas sensors using In₂O₃-ZnO composite films

Chia Yu Lin, Yueh Yuan Fang, Chii Wann Lin, James J. Tunney, Kuo Chuan Ho

Department of Chemical Engineering

Research output: Contribution to journal › Article › peer-review

81 Citations (Scopus)

Abstract

In₂O₃-ZnO composite films were fabricated and their NO_x sensing characteristics were investigated in this study. The content of ZnO in In₂O₃-ZnO film was controlled by adjusting the Zn²⁺/In³⁺ molar ratio (r) during the film preparation. With suitable amount of ZnO incorporated into the In₂O₃ films, the responses of the composite films to NO_x at operation temperatures below 200 °C were greatly improved. However, as the ZnO content was further increased, the grain of the composite film started to merge into big ones, thus decreasing the surface area and resulting in lower sensor responses. The detection limit (S/N = 3) of In₂O₃-ZnO composite film (r = 0.67) reached 12 ppb at 150 °C. Both pure In₂O₃ (r = 0) and In₂O₃-ZnO composite films (r = 0.67) showed no response to CO gas.

Original language	English
Pages (from-to)	28-34
Number of pages	7
Journal	Sensors and Actuators, B: Chemical
Volume	146
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2010.02.040
Publication status	Published - 2010 Apr 8

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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title = "Fabrication of NOx gas sensors using In2O3-ZnO composite films",

abstract = "In2O3-ZnO composite films were fabricated and their NOx sensing characteristics were investigated in this study. The content of ZnO in In2O3-ZnO film was controlled by adjusting the Zn2+/In3+ molar ratio (r) during the film preparation. With suitable amount of ZnO incorporated into the In2O3 films, the responses of the composite films to NOx at operation temperatures below 200 °C were greatly improved. However, as the ZnO content was further increased, the grain of the composite film started to merge into big ones, thus decreasing the surface area and resulting in lower sensor responses. The detection limit (S/N = 3) of In2O3-ZnO composite film (r = 0.67) reached 12 ppb at 150 °C. Both pure In2O3 (r = 0) and In2O3-ZnO composite films (r = 0.67) showed no response to CO gas.",

author = "Lin, {Chia Yu} and Fang, {Yueh Yuan} and Lin, {Chii Wann} and Tunney, {James J.} and Ho, {Kuo Chuan}",

note = "Funding Information: This work was sponsored by the National Research Council of Taiwan under grant numbers NSC 97-2220-E-006-008 , NSC 98-2220-E-006-008 , and NSC 98-EC-17-A-02-S2-0125 . ",

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AU - Fang, Yueh Yuan

AU - Lin, Chii Wann

AU - Tunney, James J.

AU - Ho, Kuo Chuan

N1 - Funding Information: This work was sponsored by the National Research Council of Taiwan under grant numbers NSC 97-2220-E-006-008 , NSC 98-2220-E-006-008 , and NSC 98-EC-17-A-02-S2-0125 .

PY - 2010/4/8

Y1 - 2010/4/8

N2 - In2O3-ZnO composite films were fabricated and their NOx sensing characteristics were investigated in this study. The content of ZnO in In2O3-ZnO film was controlled by adjusting the Zn2+/In3+ molar ratio (r) during the film preparation. With suitable amount of ZnO incorporated into the In2O3 films, the responses of the composite films to NOx at operation temperatures below 200 °C were greatly improved. However, as the ZnO content was further increased, the grain of the composite film started to merge into big ones, thus decreasing the surface area and resulting in lower sensor responses. The detection limit (S/N = 3) of In2O3-ZnO composite film (r = 0.67) reached 12 ppb at 150 °C. Both pure In2O3 (r = 0) and In2O3-ZnO composite films (r = 0.67) showed no response to CO gas.

AB - In2O3-ZnO composite films were fabricated and their NOx sensing characteristics were investigated in this study. The content of ZnO in In2O3-ZnO film was controlled by adjusting the Zn2+/In3+ molar ratio (r) during the film preparation. With suitable amount of ZnO incorporated into the In2O3 films, the responses of the composite films to NOx at operation temperatures below 200 °C were greatly improved. However, as the ZnO content was further increased, the grain of the composite film started to merge into big ones, thus decreasing the surface area and resulting in lower sensor responses. The detection limit (S/N = 3) of In2O3-ZnO composite film (r = 0.67) reached 12 ppb at 150 °C. Both pure In2O3 (r = 0) and In2O3-ZnO composite films (r = 0.67) showed no response to CO gas.

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