Fabrication of organic light-emitting diode arrays on flexible plastic substrates by imprint lithography method

Chiao Yang Cheng, I. Min Chan, Franklin Chau-Nan Hong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Imprint lithography has been employed as a patterning technology for the fabrication of organic light emitting diode (OLED) devices on flexible substrates. A thin PMMA layer was first spin-coated as the etching barrier on the commercial indium-tin-oxide (ITO)-coated PET substrate. The desired PMMA pattern was obtained by pressing a patterned silicon mold on to the PMMA-coated substrate. The silicon mold was coated with a fluorine-doped diamond-like carbon film for easy mold-releasing. After etching away the residual layer in O 2 plasma, the patterned ITO arrays were fabricated by etching in oxalic acid solution and then washing in acetone. Arrays of OLED devices with a device structure of TPD/Alq3/Bphen/LiF/Al (25 nm/30 nm/50 nm/1.5 nm/200 nm) were fabricated on the ITO anode (on PET substrate) patterned by imprint lithography. High quality OLED arrays were obtained exhibiting a turn-on voltage of 4.8 V, a maximum luminous efficiency, of 4.7 cd/A, a maximum power efficiency of 2.8 lm/W, and a maximum luminance of 30,000 cd/m2.

Original languageEnglish
Title of host publicationProceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05
EditorsH.P. David Shieh, F.C. Chen
Pages778-780
Number of pages3
Publication statusPublished - 2005
EventInternational Display Manufacturing Conference and Exhibition, IDMC'05 - Taipei, Japan
Duration: 2005 Feb 212005 Feb 24

Other

OtherInternational Display Manufacturing Conference and Exhibition, IDMC'05
CountryJapan
CityTaipei
Period05-02-2105-02-24

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Cheng, C. Y., Chan, I. M., & Hong, F. C-N. (2005). Fabrication of organic light-emitting diode arrays on flexible plastic substrates by imprint lithography method. In H. P. David Shieh, & F. C. Chen (Eds.), Proceedings of the International Display Manufacturing Conference and Exhibition, IDMC'05 (pp. 778-780)