Fabrication of PZT thick film on platinum-coated silicon substrate by an improved sol-gel deposition method

Chun I. Lin, Yung-Chun Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This article has proposed the fabrication of thick films of lead zirconate titanate (PZT) on a Pt/Ti/SiO2/Si substrate using an improved sol-gel method. To achieve thicker PZT films within reasonable working time, this paper adopts sol-gel coating method but using PZT slurry which contains well dispersed and ball-milled sub-micrometer PZT powders in a sol-gel precursor solution. The PZT slurry is then spin-coated onto a substrate followed by pyrolysis thermal treatments. To enhancing the PZT film qualities, an improved vacuum infiltration treatment has been implemented in addition to conventional sol-gel coating and thermal processing. With the above-mentioned improvements, thicker PZT films with excellent characteristics are obtained. Microstructure and cross-section have been characterized by means of scanning electron microscopy (SEM). The ferroelectric property has been also determined by the ferroelectric analyzer. Films with a thickness in the range from 2.4 m to 12.8 μm can be obtained within hours by the improved sol-gel method. When the thickness of the film is 12.8 μm, the maximum remanent polarization is 24.48 μC/cm2 and the coercive field is 122.72 kV/cm at the maximum electric field, 625kV/cm. These PZT films are ready for device applications.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages567-570
Number of pages4
DOIs
Publication statusPublished - 2011 Oct 4
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
Duration: 2011 Feb 202011 Feb 23

Publication series

NameNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Other

Other6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
CountryTaiwan
CityKaohsiung
Period11-02-2011-02-23

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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    Lin, C. I., & Lee, Y-C. (2011). Fabrication of PZT thick film on platinum-coated silicon substrate by an improved sol-gel deposition method. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 567-570). [6017419] (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017419