Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method

Yung Chun Lee; Chun Hsiang Chen; Cheng Yu Chiu; Fuh Yu Chang

doi:10.1117/1.2970146

Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method

Yung Chun Lee, Chun Hsiang Chen, Cheng Yu Chiu, Fuh Yu Chang

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.

Original language	English
Article number	033006
Journal	Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume	7
Issue number	3
DOIs	https://doi.org/10.1117/1.2970146
Publication status	Published - 2008 Jan 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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abstract = "We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.",

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N2 - We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.

AB - We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.

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