Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method

Yung-Chun Lee, Chun Hsiang Chen, Cheng Yu Chiu, Fuh Yu Chang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.

Original languageEnglish
Article number033006
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume7
Issue number3
DOIs
Publication statusPublished - 2008 Jan 1

Fingerprint

Quartz
quartz
Fabrication
fabrication
Lasers
Molds
lasers
etching
Metallic films
Dry etching
rollers
Excimer lasers
Silicon
energy sources
Surface structure
printing
excimer lasers
Printing
Masks
Etching

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

@article{9da7b384ac0843e3b08dc6b0715dd6fc,
title = "Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method",
abstract = "We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.",
author = "Yung-Chun Lee and Chen, {Chun Hsiang} and Chiu, {Cheng Yu} and Chang, {Fuh Yu}",
year = "2008",
month = "1",
day = "1",
doi = "10.1117/1.2970146",
language = "English",
volume = "7",
journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",
issn = "1932-5150",
publisher = "SPIE",
number = "3",

}

Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method. / Lee, Yung-Chun; Chen, Chun Hsiang; Chiu, Cheng Yu; Chang, Fuh Yu.

In: Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, No. 3, 033006, 01.01.2008.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Fabrication of quartz mold with submicrometer features based on laser-assisted contact transfer method

AU - Lee, Yung-Chun

AU - Chen, Chun Hsiang

AU - Chiu, Cheng Yu

AU - Chang, Fuh Yu

PY - 2008/1/1

Y1 - 2008/1/1

N2 - We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.

AB - We report a simple method for fabricating quartz molds with submicrometer- and nanoscaled surface structures. It utilizes an excimer laser as the energy source and a roller-type contact-printing setup for directly transferring a patterned metallic thin film from a silicon mold to a quartz substrate. The transferred metallic patterns are subsequently used as an etching mask for dry etching on the quartz plate. Experiments have been carried out to determine the optimal parameters for successful pattern transformation. Experimental results on fabricating quartz molds are presented, and potential applications of this innovative pattern transformation method are addressed.

UR - http://www.scopus.com/inward/record.url?scp=80055044479&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80055044479&partnerID=8YFLogxK

U2 - 10.1117/1.2970146

DO - 10.1117/1.2970146

M3 - Article

VL - 7

JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

SN - 1932-5150

IS - 3

M1 - 033006

ER -