Fabrication of sub-quarter-micron grating patterns by employing DUV holographic lithography

L. A. Wang, Chun-Hung Lin, J. H. Chen

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication of sub-quarter-micron grating patterns by employing DUV holographic lithography'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds