Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method

Po Ching Kao, Sheng-Yuan Chu, Chuan Yi Zhan, Lien-Chung Hsu, Wen Chang Liao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

A new patterning method has been developed to fabricate the patterned organic light emitting devices (OLEDs) with pixels of 500 μm × 300 μm on the flexible PET substrates. The patterns of the pixel array were defined in crossed-strip style with ITO anode patterned using a combination of the roller-type imprinting lithography and photolithography (CRIP), followed by wet chemical etching. Compared with the conventional imprint lithography or photolithography, CRIP using the hybrid mold has the advantages of better uniformity, less force, less time-consuming, lower cost and higher aspect ratio.

Original languageEnglish
Title of host publication2005 5th IEEE Conference on Nanotechnology
Pages885-887
Number of pages3
DOIs
Publication statusPublished - 2005 Dec 1
Event2005 5th IEEE Conference on Nanotechnology - Nagoya, Japan
Duration: 2005 Jul 112005 Jul 15

Publication series

Name2005 5th IEEE Conference on Nanotechnology
Volume2

Other

Other2005 5th IEEE Conference on Nanotechnology
CountryJapan
CityNagoya
Period05-07-1105-07-15

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Kao, P. C., Chu, S-Y., Zhan, C. Y., Hsu, L-C., & Liao, W. C. (2005). Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method. In 2005 5th IEEE Conference on Nanotechnology (pp. 885-887). [1500860] (2005 5th IEEE Conference on Nanotechnology; Vol. 2). https://doi.org/10.1109/NANO.2005.1500860